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SILICON THIN FILM CHIP RESISTORS

R3000-S

The R3000-S series of microwave thin film resistors is designed to be used in microwave hybrid circuits for biasing of active components. These devices can be used over the full military temperature range -55°C to +125°C. Quality and workmanship is per MIL-S-883. Level B. Devices are 100% tested, visual inspected and packaged in waffle packs. US Microwaves employs proprietary thin film technologies for deposition of a wide range of sheet resistance films from 1W/sq to 10.000W /sq. Resistors from 0.1W to x MW range are available.

R(W) USM Part # R(W) USM Part # R(W) USM Part # R(W) USM Part #
1.0 R3000-S-1P0 10 R3000-S-10P0 100 R3000-S-100P0 1000 R3000-S-1000
1.2 R3000-S-1P2 12 R3000-S-12P0 120 R3000-S-120P0 1200 R3000-S-1200
1.5 R3000-S-1P5 15 R3000-S-15P0 150 R3000-S-150P0 1500 R3000-S-1500
1.8 R3000-S-1P8 18 R3000-S-18P0 180 R3000-S-180P0 1800 R3000-S-1800
2.2 R3000-S-2P2 22 R3000-S-22P0 220 R3000-S-220P0 2200 R3000-S-2200
2.7 R3000-S-2P7 27 R3000-S-27P0 270 R3000-S-270P0 2700 R3000-S-2700
3.3 R3000-S-3P3 33 R3000-S-33P0 330 R3000-S-330P0 3300 R3000-S-3300
3.9 R3000-S-3P9 39 R3000-S-39P0 390 R3000-S-390P0 3900 R3000-S-3900
4.7 R3000-S-4P7 47 R3000-S-47P0 470 R3000-S-470P0 4700 R3000-S-4700
5.0 R3000-S-5P0 50 R3000-S-50P0 500 R3000-S-500P0 5000 R3000-S-5000
5.6 R3000-S-5P6 56 R3000-S-56P0 560 R3000-S-560P0 5600 R3000-S-5600
6.8 R3000-S-6P8 68 R3000-S-68P0 680 R3000-S-680P0 6800 R3000-S-6800
7.5 R3000-S-7P5 75 R3000-S-75P0 750 R3000-S-750P0 7500 R3000-S-7500
8.2 R3000-S-8P2 82 R3000-S-82P0 820 R3000-S-820P0 8200 R3000-S-8200

SUBSTRATE INFORMATION RESISTOR SPECIFICATIONS
Material Thickness (mils) Die size (mils) Power rating Tolerances q% Capacitance
SiO2/Silicon 10 ±1 (30±2)x(30±2) 200mW@70°C 1, 5, 10 2.2pF

PROCESS INFORMATION
Resistor Conductor Backside metallization
The resistive material is high stability Tantalum Nitride with low temperature coefficient of resistance, <75ppm/°C typical. For Rsq<10W/sq and Rsq>500W/sq, the resistive material is proprietary. The bonding pads of the resistors are 3m thick, 99.99% electroplated gold with a TiW barrier that withstands 30 min at 400°C in air without loss of adhesion. The backside of the die is metallized with TiW/Au which is compatible with most die attaching methods. Other metallizations are available upon special request.

ORDERING INFORMATION R3000-S-xxPx-q %

TOLERANCE q MINIMUM ORDER U/P($) /1K U/P($) /5K U/P($) /10K U/P($) /50K U/P($) /100K DELIVERY ORDER
10% $320 / 200 pc           2 weeks ARO for 5% and 10% tolerance and 3-4 weeks ARO for 1%. Certain items are available from Stock
5% $320 / 125 pc          
1% $320 / 75 pc          

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